High energy! All-solid-state nanosecond UV laser for cutting bioengineering, optical devices

UV lasers are mainly used for drilling, cutting, scribing and marking. It reflects its unique advantages in laser processing: the ultraviolet laser has a short wavelength and small focus, and can achieve fine processing; the ultraviolet laser directly destroys the chemical bonds of the material during laser processing, which is a "cold" processing process and a small heat-affected zone: most The material can effectively absorb ultraviolet light and can process many materials that cannot be processed by infrared and visible light lasers. All-solid-state UV lasers have the advantages of small size, high efficiency, high repetition frequency, no gas replacement, no mask, and easy maintenance. Therefore, it has been widely used in bioengineering, material preparation, all-optical optical device fabrication, especially in the laser processing fields of integrated circuit boards and semiconductor industries.

At present, the development of ultraviolet lasers is very rapid. High-repetition-frequency all-solid-state lasers above watt-level power are continuously used in processing. Domestic and foreign research institutions and companies continue to develop higher power (tens of watts) and higher repetition frequencies (tens or even several tens of watts). 100 kHz) direction. At present, we have successfully developed a 5W, 50kHz UV 355nm laser with a pulse width of 25ns. A prototype has been made with stable performance. It is used for scribing of LED sapphire wafer slivers. The scribe depth reaches 200μm, the line width is less than 10μm, the scratches are smooth and uniform, and there is almost no heat affected zone.

The current international market price of UV 355nm lasers is about $20,000/W, and the market for medium and high-power all-solid-state UV lasers is occupied by foreign manufacturers. According to the statistics of industry associations, in 2010, the sales of my country's all-solid-state ultraviolet laser market reached 500 million yuan, an increase of 25% over 2009. Taking the laser dicing machine as an example, according to the current market demand, the general sales volume of traditional laser dicing machines is 100 units per year, of which 60% will be replaced by ultraviolet all-solid-state lasers; the domestic annual demand for laser marking machines is about 4,000 units. Taiwan, in which all-solid-state UV lasers will replace 30% of the market share.

The fundamental mode infrared 1064nm laser is obtained through the high-efficiency end-face pumping structure, and then through the multi-stage amplification structure, the high-power infrared high-beam quality fundamental frequency light is obtained, and then through the high-efficiency frequency conversion technology, the 5W, 50kHz, 25ns pulse ultraviolet light is finally obtained. 355nm laser.